固态微波功率器件测试方法研究  

Research on Test Method of Solid State Microwave Power Devices

作　　者：王文娟[1] 项道才[1] 胡菊萍[1] 

机构地区：[1]中国电子技术标准化研究院,北京100076

出　　处：《半导体技术》2012年第12期974-978,共5页Semiconductor Technology

摘　　要：固态微波功率器件由于其大功率、高频率、宽频带的特性,使其微波电参数的测试成为一大难点,特别是对非同轴、无内匹配的功率器件而言,微波参数的测量难度更大。介绍了固态微波功率器件测试的整体方案,针对某款SiC器件的尺寸及特性,设计制作了相应的测试夹具及校准件,利用矢量网络分析仪及阻抗调谐器搭建测试平台,通过负载牵引技术调整输入输出阻抗,并通过TRL校准技术消除夹具引入的误差,将被测端面移动到被测件的两端,得到被测器件的真实特性。经实验验证,在器件工作频率范围内测试系统的阻抗都能达到良好匹配,并得到被测器件的最佳性能指标。As the characteristics of the high power,high frequency and wide band,the microwave electric parameters of the solid state microwave power device are difficult to test.Especially the non-coaxial microwave device or no matching impedance device is more difficult to test.A whole plan of the test about the solid state microwave power device was introduced.The test fixture and the calibration device of a SiC microwave power device were designed and finished.The test platform was built through the vector network analyzer and impedance tuner.The input and output impedance were tuned through the load pull technique.The error of the test fixture was eliminated by TRL calibration and the measured surface was moved to both sides of the DUT.Then the real performances of the devices were obtained.Experimental verifies that the impedance is matching well and the optimal performance index is obtained in the test of different frequency points during the frequency range of devices.

关 键 词：微波功率器件 测试夹具 校准件 负载牵引系统 去嵌入 

分 类 号：TN307[电子电信—物理电子学]