采用TEG技术的半导体集成电路可靠性评价方法  

Reliability Evaluation of Semiconductor ICs by TEG Technology

作　　者：许斌[1] 

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060

出　　处：《微电子学》2012年第6期855-859,共5页Microelectronics

摘　　要：详细介绍了一种新近采用的先进半导体集成电路可靠性评价技术———TEG技术。对其基本概念、评价方法以及应用情况进行了详细的阐述,重点介绍了其中的WLR TEG可靠性在线检测与控制技术;最后,对我国开展相关工作提出了切实可行的建议,以确保并提高我国军用半导体集成电路的固有可靠性水平,促进军用微电子技术的快速发展。An advanced technology for reliability evaluation of semiconductor ICs, TEG, was described. Basic concept, evaluation methods and applications of this technology were dealt with in detail. WLR TEG, which is regarded as a useful on-line detection and control technology, was discussed in particular. Finally, practical and feasible suggestions were proposed, which may help to improve the intrinsic reliability of domestic military semiconductor ICs and promote the development of military microelectronics technology in China.

关 键 词：半导体集成电路 可靠性评价 测试元素组 固有可靠性 

分 类 号：TN306[电子电信—物理电子学]