掺钨类金刚石膜离子渗硫后的微观结构与摩擦学性能  

Microstructure and tribological behavior of sulfurized W-doped diamond-like carbon film

作　　者：岳文[1] 高晓成[1] 王松[1] 付志强[1] 王成彪[1] 刘家浚[2] 

机构地区：[1]中国地质大学(北京)工程技术学院,北京100083 [2]清华大学机械工程系,北京100084

出　　处：《材料热处理学报》2012年第12期121-125,共5页Transactions of Materials and Heat Treatment

基　　金：国家自然科学基金项目(51005218);中央高校基本业务费自由探索项目(2012ZY51)

摘　　要：探讨了掺钨类金刚石(W-DLC)膜沉积及离子渗硫两步合成DLC和WS2复合固体润滑膜的新方法。利用低温离子渗硫技术对4种钨含量的W-DLC膜进行离子渗硫处理,采用扫描电子显微镜(SEM)、俄歇扫描探针(SAM)、X射线光电子能谱(XPS)、拉曼光谱仪(Raman),纳米硬度计(Nano-indenter)和摩擦磨损试验机考察了渗硫处理后W-DLC膜的微观结构与摩擦学性能。结果表明:渗硫处理使W-DLC膜中生成了WS2,促进了DLC膜的石墨化,并降低了其纳米硬度;随钨含量增加,渗硫处理的W-DLC膜纳米硬度逐渐升高,摩擦系数和磨损率逐渐减小,渗硫后的27.7%W-DLC膜表现出最优异的摩擦学性能。A new method for synthesizing W-doped diamond-like carbon （W-DLC） with WS2 composite solid lubrication film by deposition and low temperature ion sulfuration technology was studied. W-DLC films with different W contents were prepared. Microstructure, nanohardness and tribological behavior of the sulfurized W-DLC film were investigated by means of scanning electron microscopy （SEM） , scanning Auger microscopy （ SAM ）, X-ray photoelectron spectroscopy （ XPS）, Raman spectroscopy （ Raman）, Nano-indentation, friction and wear tester. The results show that WS2 is formed and the content of sp2 - C increases on the surface of W-DLC film after ion sulfuration, which makes the hardness of W-DLC film decrease. The nanohardness of the sulfurized W-DLC film rises with the increase of W content in the film while the friction coefficient and the wear rate decreases with the rise of W content in the film. The sulfurized W- DLC film with the W content of 27.7% exhibits the lowest friction coefficient and wear rate.

关 键 词：掺钨类金刚石 低温离子渗硫 固体润滑膜 摩擦学性能 

分 类 号：TG161[金属学及工艺—热处理]