用于气体流量控制的压电陶瓷阀的温度特性  

CHARACTERISTIC OF PIEZOELECTRIC CERAMIC VALVE IN THE APPLICATION OF GAS FLOW CONTROL

作　　者：刘洪金 池华敬[2] 郭帅[2] 陈革[2] 章其初[2] 

机构地区：[1]山东温屏节能玻璃有限公司,山东德州253000 [2]皇明太阳能股份有限公司,山东德州253000

出　　处：《真空与低温》2012年第4期228-231,共4页Vacuum and Cryogenics

摘　　要：采用PEV-1型压电陶瓷阀作为溅射气体Ar流量输出的驱动元件,用于真空磁控溅射镀膜中溅射气体恒压力控制。应用过程中发现压电陶瓷阀本身的迟滞特性和温度特性对气体输出流量有较大影响。试验分析得到压电陶瓷阀偏振电压变化过程中,气体输出流量的迟滞曲线。当压电陶瓷阀环境温度升高时,该迟滞特性会减弱,气体输出流量随偏振电压变化速率变大。PEV-1 type piezoelectric ceramic valve is used as the output drive element of Ar in the system of vacuum magne tron sputtering. The influence of piezoelectric ceramic characteristic on gas flow control is discussed. Especially the depend ence of Ar output flow on the polarization voltage and environment temperature. During the process of polarization voltage in creasing first and decreasing then, the Ar output flow curve showed hysteresis. At the same time, the hysteresis curve is dis tinct with the changing of environmental temperature. The lower temperature, the more obvious hysteresis effect is.

关 键 词：压电陶瓷 迟滞特性 温度特性 有效工作电压 

分 类 号：TH138.52[机械工程—机械制造及自动化]