单镜头激光三角法薄板厚度测量研究  

Research of thin plate thickness measurement based on single lens laser triangulation

作　　者：汪琛[1] 赵斌[1] 

机构地区：[1]华中科技大学机械科学与工程学院测控装备研究所,武汉430074

出　　处：《激光技术》2013年第1期6-10,共5页Laser Technology

基　　金：国家九七三重点基础研究发展计划资助项目(2007CB714000)

摘　　要：为了精确测量薄板类材料的厚度,分析了双光路激光三角法测厚原理,建立了一种单镜头激光三角法厚度测量系统。该系统以半导体激光器为光源,配以单镜头成像系统、图像采集与数据处理系统。描述了系统的检测原理、检测方法和实验装置,讨论了激光器光束轴心线与成像透镜光轴夹角与系统分辨率的关系,并基于最小二乘法拟合得出了光斑距离与被测物厚度的函数关系式,最后通过标定实验对系统精度进行了实验论证。结果表明,该系统消除了双光路激光三角法上下测量系统难以同步的问题,分辨率高,精度控制在10μm,良好地满足了工业测量的需求。In order to measure the thickness of thin plates accurately,the principle of thickness measurement based on double light path laser triangulation was summarized, and a gauging system based upon single lens laser triangulation was established. This system consists of two symmetrically-installed laser devices, a single lens imaging system, an image acquisition system and a data analysis system. Then the principle of measurement, measurement method and experimental facility were described. In the following part, the relation between system distinguishability and intersection angle among laser beam axis line and imaging lens axis was discussed, after that the least square fitting method was selected to get the fitted equation between measure thickness and flare spacing convenient to data analysis. Finally, a calibration experiment was conducted to demonstrate the accuracy. It is found that this system not only eliminate the difficulty of synchronization problem laid in double light path laser triangulation method but also has a high distinguishability, it meets the commnercial measurement demand well.

关 键 词：测量与计量 激光测厚 重心法 分辨率 

分 类 号：TN247[电子电信—物理电子学] TH744.5[机械工程—光学工程]