PVD法制备TiN涂层界面特征与摩擦磨损性能  

Surface and Interface Properties of TiN Films Grown by Physical Vapor Deposition

作　　者：孔德军[1] 付永忠[1] 吴永忠[1] 王文昌[1] 

机构地区：[1]常州大学机械工程学院,常州213016

出　　处：《真空科学与技术学报》2012年第12期1078-1083,共6页Chinese Journal of Vacuum Science and Technology

基　　金：江苏省科技支撑计划(工业)(BE2012066);江苏省高校自然科学基础研究项目(No.08KJB430002);常州市应用基础研究计划(No.CJ20110019)

摘　　要：采用物理气相沉积法在Cr12MoV钢基体上制备了TiN涂层，利用扫描电镜、能量色散谱、X射线衍射和轮廓仪对涂层形貌特征、化学元素、物相组成和表面粗糙度进行了表征，用划痕法测试其结合强度，并分析划痕法涂层失效过程。通过往复磨损试验考察了其摩擦磨损性能，对涂层磨损机理进行了讨论。结果表明，TiN涂层主要组成相为TiN，试样表面粗糙度Ra值为328．91μm，涂层表面显微硬度达到2100～2200HV；涂层厚度约为5μm，与基材之间存在一定的混合界面，其界面结合强度为28．85N；在干滑动磨损实验条件下摩擦系数为0．45～0．52，涂层具有优异的耐磨性，其磨损机制主要为磨粒磨损。The TiN coatings were grown by physical vapor deposition （PVD）on Cr12MoV steel substrates. The influ- encing growth factors were evaluated. The microstructures and mechanical properties of the surface and interface were characterized with X-ray diffraction, energy dispersive spectroscopy, X-ray photoelectron spectroscopy and conventional mechanical probes. The results show that the fairly smooth and compact TiN coatings, 5 μm thick, significantly improved the mechanical properties, such as the micro-hardness, wear resistance, and friction coefficient, of the Cr12MoV steel. Pos- sible mechanisms were also tentatively discussed. In addition, the adhesion at the inter-diffused interface of TiN and the steel substrate was found to be about 28.85 N.

关 键 词：物理气相沉积 TIN涂层 结合强度 摩擦系数 磨损性能 

分 类 号：TH117.1[机械工程—机械设计及理论] TG115.58[金属学及工艺—物理冶金]