基于前馈控制的压电单轴实时位移控制系统  

Feed-forward Control Oriented Real-time Displacement Controller for Single-axis Piezo Actuator

作　　者：张建华[1] 李宏胜[1] 葛红宇[1] 滕福林[1] 

机构地区：[1]南京工程学院自动化学院,江苏南京211167

出　　处：《南京理工大学学报》2012年第6期957-961,983,共6页Journal of Nanjing University of Science and Technology

基　　金：江苏省自然科学基金(BK2009350);江苏省高校自然科学基金(09KJB460005)

摘　　要：为满足微细加工、超精加工等的实时性、精度要求,基于前馈复合控制,提出一种压电单轴精密位移的嵌入式实时控制系统。建立了压电致动器的阶跃响应模型、迟滞特性的Preisach及逆模型。采用Preisach逆模型作为前馈控制环节、比例积分控制作为反馈环节,设计前馈复合控制器。研制了基于S3C2410控制器的压电单轴实时位移控制系统。测试表明:阶跃响应稳态误差小于0.15μm,调节时间约1.2 ms,超调量约10%;正弦响应误差为-0.41～0.45μm,在±1.5%以内;该系统能满足多个领域的实时精确控制要求。To meet the demands on real time performances and accuracies of micro machining, ultra precision machining, etc, a feed-forward control oriented real-time single-axis micro displacement controller by piezo actuator is suggested with an embedded processor. The hysteresis and step response models of piezo actuator are built, and the realization of reverse Preisach model are suggested. Using the reverse Preisach model as a feed-forward control unit and the proportional-integral （PI）controller as a feedback control unit, a compound controller is developed. A real-time single-axis micro displacement controller with the abeve-mentioned models is achieved with a 32-bit embedded processor, $3C2410. System tests indicate that ：as for the step response ,the steady state error is less than O. 15 Ixm,the settling time is about 1.2 ms and the overshoot is about 10% ; as for the sinusoidal response, the displacement error is ranged from -0.41 pan to 0.45 p^n,which is about ＋_1.5% ;with the controller built above,the precise ,real-time displacement control in multi-research fields can be achieved

关 键 词：前馈控制 实时控制 嵌入式系统 压电致动器 

分 类 号：TP273.3[自动化与计算机技术—检测技术与自动化装置]