Experimental study on optical fiber bundle hydrogen sensor based on palladium-silver optical thin film  

作　　者：崔陆军 尚会超 张冈 李勇 赵则祥 

机构地区：[1]School of Mechanical & Electronic Engineering, Zhongyuan University of Technology

出　　处：《Optoelectronics Letters》2013年第1期13-17,共5页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No.50974062);the Basic and Frontier Technology Research Project of Henan Province (Nos.082300410320 and 122300410321);the Scientific Research Program of Department of Education of Henan Province (No.2008B520044)

摘　　要：In this paper, a 20 nm palladium-silver (Pd/Ag) ultrathin optical film is used for hydrogen gas sensing. The mole ratio of the two metals is controlled at Pd:Ag=3:1. In the direct current (DC) sputtering machine, the optical thin film is evaporated on the optical glass. Compared with pure palladium, the Pd/Ag alloy can increase the life and the stability of the sensing film. Optimum sputtering parameters for Pd/Ag alloy are presented in this paper, and the effects of different experimental conditions for hydrogen sensor are investigated, including the temperature effect, humidity effect and cross sensitivity of hydrogen sensor for different gases. The experiment results indicate that the hydrogen sensor based on Pd/Ag optical thin film exhibits good sensing characteristics. The existing of CO and water in hydrogen increases the response time and decreases the response amplitude of optical fiber bundle hydrogen sensor. The experiment results show that the increasing temperature can eliminate the effect and shorten hydrogen sensor response time effectively.In this paper, a 20 nm palladium-silver （Pd/Ag） ultrathin optical film is used for hydrogen gas sensing. The mole ratio of the two metals is controlled at Pd：Ag=3：1. In the direct current （DC） sputtering machine, the optical thin film is evaporated on the optical glass. Compared with pure palladium, the Pd/Ag alloy can increase the life and the stability of the sensing film. Optimum sputtering parameters for Pd/Ag alloy are presented in this paper, and the effects of different experimental condi- tions for hydrogen sensor are investigated, including the temperature effect, humidity effect and cross sensitivity of hydro- gen sensor for different gases. The experiment results indicate that the hydrogen sensor based on Pd/Ag optical thin film exhibits good sensing characteristics. The existing of CO and water in hydrogen increases the response time and decreases the response amplitude of optical fiber bundle hydrogen sensor. The experiment results show that the increasing tempera- ture can eliminate the effect and shorten hydrogen sensor response time effectively.

关 键 词：氢气传感器 实验条件 光学薄膜 光纤束 氢传感器 钯 银 溅射参数 

分 类 号：TN253[电子电信—物理电子学] TP212[自动化与计算机技术—检测技术与自动化装置]