激光干涉法微位移测量技术综述  

Review of High-resolution Measuring Method of Displacement Using Laser Interferometer

作　　者：段小艳[1] 任冬梅[1] 

机构地区：[1]中航工业北京长城计量测试技术研究所,北京100095

出　　处：《计测技术》2012年第6期1-5,13,共6页Metrology & Measurement Technology

基　　金：国家"十一五"技术基础计量科研项目资助(J052010C001)

摘　　要：激光干涉法位移测量技术具有可溯源、分辨力高、测量速度快等独特优势,是目前和近期纳米级以上分辨力位移测量的主流技术。本文对目前主要的激光干涉位移测量技术进行了分类介绍,重点讨论了高分辨力干涉微位移测量技术,并对各种干涉仪的特点进行了分析。Interferometry is a main method of high accuracy displacement measurement for its superiority like traceability, high resolution and high speed. The main measuring methods of displacement using laser interferometer are introduced with emphasis on the high-resolution mi- cro-displacement measurement method, and the characteristics of the commonly used interferometers are analyzed. The developing trend for inter- ferometrie displacement measurement is prospected.

关 键 词：微位移测量 高分辨力 可溯源 激光干涉仪 

分 类 号：TB921[一般工业技术—计量学] TH744.3[机械工程—测试计量技术及仪器]