粗硅的氧化精炼  

Oxidation Refinement of Crude Silicon

作　　者：戴永年[1] 马文会[1] 杨斌[1] 刘大春[1] 栗曼[1] 魏钦帅[1] 

机构地区：[1]昆明理工大学,云南昆明650093

出　　处：《昆明理工大学学报（自然科学版）》2012年第6期12-20,共9页Journal of Kunming University of Science and Technology(Natural Science)

基　　金：国家自然科学基金项目(U1137601;51104080)

摘　　要：冶金法精炼硅制多晶硅(6N),供太阳能电池使用,其成本可能较低而受到关注.冶金法中重要的一步是氧化法,它将粗硅中的杂质氧化成化合物的自由能(△G)位低的全部或部分除去,如Al、Ca、Ti、B、C等.氧化精炼硅用的方法有炉中吹炼、等离子吹炼;吹的气体有氩气、氮气、氧气、空气、H2O、CO2和氢气等.本文将研究工作和工厂实践集中归纳,力图明晰氧化法精炼硅的规律,以利于进一步深入研究和生产实践.The metallurgical method to refine silicon for making multi-crystalline silicon can meet the need of solar cell production.The method has drawn people＇s attention due to its low production cost.As an important part of the metallurgical method to refine silicon,oxidation method makes many impurities of crude silicon that has low oxidized free energy（ΔG） level be oxides to leave silicon,such as Al,Ca,Ti,B and C.Its apparatus includes furnaces with plasma jet over the surface of the silicon melt,and blowing gas from the furnace＇s bottom pipe.The reacting gases can be Ar,N2,O2,air,H2O,CO2 and H2.In this paper the research works and plant production practices of refining silicon are collected to find the law of oxidation refining silicon for advanced research and production of 6N silicon.

关 键 词：多晶硅 氧化法 吹炼 等离子气 H2 O2比 

分 类 号：TF89[冶金工程—有色金属冶金]