扫描镜设计与精度分析  

Design and acurracy analysis of scanning mirror

作　　者：汪逸群[1,2] 颜昌翔[1] 贾平[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033 [2]中国科学院研究生院,北京100039

出　　处：《电子测量与仪器学报》2012年第12期1062-1068,共7页Journal of Electronic Measurement and Instrumentation

基　　金：国防预研基金(编号:O5001SA050)资助项目

摘　　要：为了满足高光谱成像仪对地运动补偿的需求,设计了一套扫描镜装置并详细分析了扫描镜的运动精度。首先,介绍了扫描镜的运动补偿原理和性能指标要求,据此给出了基于步进电机与谐波减速器的扫描镜驱动方案。接着描述了驱动模块、镜子支撑、轴系及控制电路等子系统的设计方案,然后分析计算了扫描镜的位置精度和速度精度,最后得出了位置精度优于1′,速度精度3.4%～5.2%的结论。试验结果表明:扫描镜位置精度达到40″,而扫描镜速度精度为5.3%。扫描镜运动精度满足高光谱成像仪的成像需求。In order to meet the motion compensation demand of hyper-spectral imager,a set of scanning mirror was developed and its motion precision was analysis carefully.Firstly,after the introduction of motion compensation theory and performance requirements of scanning mirror,driving mode and control technology based on precise step motor and harmonic drive were proposed.Then,the design scheme of driving module,mirror support,shafting and control circuit were depicted.And then position and speed precision were analysis and calculated.Finally the calculation results are 1′（position accuracy） and 3.4%—5.2%（speed accuracy）.The testing results indicate that scanning mirror＇s position accu-racy is 40″ and speed accuracy is 5.3%.In conclusion,the motion precision of scanning mirror meets the requirements of hyper-spectral imager.

关 键 词：扫描镜 运动补偿 速度精度 谐波减速器 步进电机 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN247[自动化与计算机技术—控制科学与工程]