基于LVDT的纳米级位移测量系统设计与实现  

Design and Implement of Nanometer Displacement Measurement System Based on LVDT

作　　者：陈刚[1] 张波[1] 刘品宽[1] 

机构地区：[1]上海交通大学机器人研究所,上海200240

出　　处：《自动化与仪表》2012年第12期1-4,41,共5页Automation & Instrumentation

基　　金：国家自然科学基金项目(50905118);上海市基础重点项目(09JC1408300);国家科技重大专项项目(2009ZX02012-001)

摘　　要：提出了一种基于数字信号处理器的线性可变差动变压器LVDT(linear variabledifferential transformer)解码方案,设计了解码器的硬件系统和软件系统。其中采用脉宽调制技术PWM(pulse width modulation)产生LVDT的激励信号,应用Goertzel算法进行实时数字信号处理,采用黄金分割算法优化BP神经网络结构实现LVDT零点附件的非线性补偿,使用程控放大器实现非线性部分的高分辨率测量。系统克服了基于模拟电路的LVDT解码电路存在的老化、零漂等问题。最后,通过实验验证了解码系统的可行性,实现了LVDT零点附件的线性化。This paper proposed a novel method to design the linear variable differential transformer（LVDT）’s decoding system which based on digital signal processor（DSP）.Present the hardware and software design of the nanometer displacement measurement system.This solution used the PWM tech nology to generate the exciting signal for LVDT,utilize the Goertzel algorithm to processing the digital signal and a programmable gain amplifier was applied in the system to get a higher resolution measurement of the nonlinear part.What’s more,an optimized BP neural network was used to do nonlinear compensation.The proposed method has overcome the aging,zero drift problems which exist in the analog-based solution.The experiments verify the feasibility of the decoding system,and have linearized the LVDT’s zero nonlinear.

关 键 词：纳米位移测量系统 线性可变差动变压器 数字信号 人工神经网络 

分 类 号：TP216[自动化与计算机技术—检测技术与自动化装置]