非平衡磁控溅射制备CrTiAlN/GLC复合涂层的表面性能及摩擦磨损性能研究  

SURFACE PROPERTIES AND TRIBOLOGICAL BEHAVIOR OF CrTiAlN/GLC DUPLEX COATINGS DEPOSITED BY AN UNBALANCED MAGNETRON SPUTTERING SYSTEM

作　　者：朱志勇[1] 施雯[1] 苑俊峰[1] 李潇[1] 万紫 

机构地区：[1]上海大学材料科学与工程学院,上海200072 [2]上海汇众汽车制造有限公司,上海201206

出　　处：《上海金属》2013年第1期21-25,共5页Shanghai Metals

摘　　要：采用非平衡磁控溅射技术在新型冷作模具钢表面制备CrTiAlN/GLC复合涂层,并应用拉曼光谱(Raman)、纳米压痕、磨损试验等测试方法分析与考察该复合涂层的组织结构、纳米硬度、结合强度和摩擦磨损性能。结果表明:CrTiAlN/GLC复合涂层由CrTiAlN和以sp2为主的非晶及微晶结构GLC组成,其纳米硬度(17.38 GPa)介于CrTiAlN与GLC单一涂层之间,但有最高的弹性模量(186.35 GPa),并与基体结合状况良好(临界载荷Lc≥60 N)。此外,复合涂层还明显地改善了基体表面的摩擦学性能,干摩擦系数为0.1～0.35,油润滑磨损率(<0.7×10-12mm3/N.mm)约为基体(1.36×10-12 mm3/N.mm)的50%。The CrTiAlN/GLC coatings were deposited on a new cold die steel surface by using an unbalanced magnetron sputtering technology. The microstructure, nanohardness, adhesion strength and wear of CrTiAlN/GLC duplex coatings were analyzed by Raman spectroscopy （ Raman）, nanoindentation and wear tests. The results indicated that CrTiMN/GLC duplex coatings consisted of CrTiAlN and amorphous phase and/or submicro-crystals of GLC, mainly combined with sp2 structure, owned a nanohardness of 17. 38 GPa between CrTiAlN and GLC coating with maximum elastic modulus of 186.35 GPa and high strengths adhesied to substrate （Lε≥60N N）. In addition, the duplex coating could improve the tribological properties of substrate, i. e., dry friction coefficients were 0.1 -0.35, and the wear factors under oil lubrication （ 〈0.7×10^-12mm^3/N·mm） were 50% of that for the uncoated substrates（ 1.36×10^-12mm^3/N·mm）.

关 键 词：CrTiAlN GLC涂层 非平衡磁控溅射 拉曼光谱 性能 磨损 

分 类 号：TG174.442[金属学及工艺—金属表面处理]