硅微陀螺仪正交耦合系数的计算及验证  

Calculation and verification of quadrature coupling coefficients of silicon microgyroscope

作　　者：姜劭栋[1] 裘安萍[1] 施芹[1] 苏岩[1] 

机构地区：[1]南京理工大学机械工程学院,江苏南京210094

出　　处：《光学精密工程》2013年第1期87-93,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2011AA040402)

摘　　要：硅微陀螺仪多采用微机械加工工艺制作,其加工的相对精度较低,从而易产生正交耦合误差,影响陀螺仪的输出。为了优化设计硅微陀螺仪结构,提高其性能,本文建立了陀螺仪正交耦合系数的理论分析模型。首先,利用能量方法推导陀螺仪驱动梁的面内刚度;然后,建立陀螺仪的刚度矩阵;最后,推导了正交耦合系数的理论计算公式。针对本课题组研制的双质量振动式硅微陀螺仪,理论计算出其直接耦合系数为4.74×10-5,二次耦合系数为8.44×10-7。得到的陀螺仪的正交耦合系数为4.75×10-5,与仿真值相差8.7%。分析得到陀螺仪正交耦合系数的最大值为2.18×10-4,与仿真值相差7.9%。最后,实验验证了计算结果的正确性。得到的结果表明,建立的正交耦合系数理论分析模型可为硅微陀螺仪的结构优化设计提供理论依据和实际指导。Silicon microgroscope is processed usually by microfabrication technology. It could lead to a quadrature coupling error and influence the output of the silicon microgyroscope for the lower relative accuracy from the fabrication processing. To optimize the structure of the silicon microgyroscope and enhance its performance, a theoretical model of quadrature coupling coefficients for the microgyro- scope was established. Firstly, energy theorem was used to infer the in-plane stiffness of driving beam to set up the stiffness matrix of the microgyroscope. Then, the theoretical analysis model of quadra- ture coupling coefficients was established. According to a dual-mass vibrating silicon microgyroscope developed by our research group, the theoretical calculation shows that the direct coupling coefficient and the second-order coupling coefficient are 4.74×10-5 and 8.44×10-7, respectively, and the quad- rature coupling coefficient of the developed microgyroscope is 4.75 ×10-5 , 8.7% different from the simulation value. Meanwhile, the analysis indicates that the maximum value of quadrature coupling coefficient is 2.18×10-4, 7.9% different from the simulation value. Finally, the calculating result is con- firmed by an experiment test. It concludes that the theoretical model of quadrature coupling coefficients can pro- vide the theory foundation and application direction for improving the properties of silicon microgyroscopes.

关 键 词：硅微陀螺仪 正交耦合系数 直接耦合 二次耦合 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] U666.1[交通运输工程—船舶及航道工程]