MEMS陀螺仪芯片级温控系统的设计  

Design of on-chip temperature-controlling system for MEMS vibratory gyroscope

作　　者：曹慧亮[1,2] 杨波[1,2] 徐露[1,2] 李宏生[1,2] 王寿荣[1,2] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096

出　　处：《东南大学学报（自然科学版）》2013年第1期55-59,共5页Journal of Southeast University：Natural Science Edition

基　　金：国家自然科学基金资助项目(61104217);教育部博士点新教师基金资助项目(200802861063);船舶工业国防预研基金资助项目(6922001045)

摘　　要：为了提高MEMS陀螺仪的温度性能,基于东南大学自主设计的TC10号温控陀螺表头,设计了一种芯片级温控系统.首先,研究了微加热丝和微热敏电阻的材料、结构以及表头的加工工艺,分析了温控系统的工作原理.然后,建立了表头内部的温度模型,利用Ziegler-Nichols经验参数法,确定了PID参数并进行系统仿真,验证了控制系统的快速性和稳定性.最后,结合模型和仿真参数设计了温控电路,并通过温度实验得到了微热敏电阻的温度特性曲线.结果显示:温控系统可将表头内温度控制在设定温度点附近;表头腔内温度和驱动模态谐振频率在-20～60℃范围内的变化量分别由温控前的78.453℃和3.76 Hz下降到温控后的4.949℃和0.48 Hz,由此验证了芯片级温控技术的可行性.To improve the temperature characteristic of a micro electro mechanical system （MEMS） gyroscope, an on-chip temperature-controlling system is designed based on the gyroscope structure chip TC10 designed by Southeast University. First, the material and structure of a micro heater and a micro thermal resistance are discussed and the working principle of the temperature-controlling sys- tem is analyzed. Then, the temperature model of the gyroscope chip is established. The proportion integration differentiation （PID） parameters are determined by using the Ziegler-Nichols method. The system model is simulated, and the rapidity and stability of the system is proved. Finally, the controlling circuit is designed through combining the model and the PID parameters. The temperature curve of the micro thermal resistance is drawn through the temperature experiments. The results show that the temperature in gyroscope chip can be controlled near the controlling point in thermal experi- ments. With the temperature controlling, when the ambient temperature ranges from -20 to 60℃, the temperature variation in gyroscope chip decreases from 78. 453 to 4. 949 ℃, and the variation of drive mode resonance frequency changes from 3.76 to 0.48 Hz, which proves the feasibility of the on-chip temperature-controlling technology.

关 键 词：芯片级温控 MEMS陀螺仪 温度模型 谐振频率 

分 类 号：V241.6[航空宇航科学与技术—飞行器设计]