压阻式硅加速度计固有频率的解析计算  

Analytical Calculation for Natural Frequency of Silicon Piezoresistive Accelerometer

作　　者：邹海荣[1] 

机构地区：[1]上海电机学院电气学院,上海200240

出　　处：《上海电机学院学报》2012年第5期312-316,324,共6页Journal of Shanghai Dianji University

基　　金：国家自然科学基金项目资助(60801048);上海市教育委员会重点学科资助(J51901)

摘　　要：固有频率对硅加速度计的性能影响很大。针对目前硅加速度计的固有频率计算公式误差大的缺点,利用力学原理推导了悬臂梁式和双端梁式硅加速度计固有频率的计算公式。计算结果与有限元软件仿真分析的结果相符。推导的公式能快速准确地计算压阻式硅加速度计的固有频率,并可直接用来编程,避免了有限元仿真分析需要反复建模的复杂过程,简化了优化设计的过程。Natural frequencies affects performance of silicon accelerometers. Current equations of natural frequencies may produce large errors in applications. For that, the reasons are studied. Equations of natural frequencies for cantilever beams and two-ended fixed beams are derived based on the principles of mechanics. The results agree with those of finite element software simulation. The equation can be used to calculate the natural frequencies of piezoresistive silicon acceleration sensors quickly and accurately. It can also be used to directly program the structural optimization design problems to avoid repeated modeling in the finite element simulation. Thus the optimization design can simplified.

关 键 词：压阻式 硅加速度计 固有频率 悬臂梁 双端梁 

分 类 号：TH824.4[机械工程—仪器科学与技术]