超低阈值横向腔光子晶体面发射激光器  

Ultralow threshold lateral cavity photonic crystal surface-emitting laser

作　　者：郑婉华[1] 王宇飞[1] 周文君[1] 渠红伟[1] 张建心[1] 齐爱谊[1] 刘磊[1] 

机构地区：[1]中国科学院半导体研究所集成光电子国家重点实验室,北京100083

出　　处：《红外与激光工程》2012年第12期3198-3201,共4页Infrared and Laser Engineering

基　　金：国家高技术研究发展计划(2012CB933501;2011CB922002);国家自然科学基金(61025025;61137003;60838003)

摘　　要：首次在无DBR结构的商业外延波导晶片上实现了电泵横向腔光子晶体面发射激光器(LC-PCSEL)。深孔刻蚀技术使光子晶体深达2.6μm,穿透有源区,对有源区的模式直接调制。通过较小区域的光子晶体与FP腔的融合集成,利用带边模式Γ2-1的横向振荡垂直输出特性,室温下获得了1553.8 nm的面发射激光,线宽0.4 nm。超低阈值电流密度为667 A/cm2,纵向和横向的远场发散角分别为7.5°和5.5°。LC-PCSEL的设计为电注入面发射激光器的研制提供了新的思路,为该类激光器的批量生产提供了可能。Lateral cavity photonic crystal surface emitting laser （LC-PCSEL） was realized on the commercial epitaxial waveguide wafer without DBR firstly. Deep hole etching technique facilitated PC as deep as 2.6 p.m, so that the active layer was etched through and the mode in it could be modulated directly by the PC. Thus by the combination of photonic crystal with small size and Fabry-Perot cavity, and employing the lateral resonance and vertical output characteristics of band-edge mode Г2-1, the electrically driven 1 553.8 nm surface emitting lasing action with linewidth of 0.4 nm was observed at room temperature. The threshold current density of 667 A/cm2 was ultralow for the surface emitting lasers. The longitudinal and lateral far-field divergence angles are 7.5 °and 5.5°, respectively. The design of LC-PCSEL provides not only new ideas for the research and fabrication of electrically injected surface emitting lasers but also mass production possibilities of such lasers.

关 键 词：光子晶体 激光器 面发射 横向腔 阈值电流密度 

分 类 号：TN248.4[电子电信—物理电子学]