纳米光波导表面粗糙度与散射损耗的分析与测试  

Analysis and test of nano-optical waveguide surface roughness and scattering loss

作　　者：臧俊斌[1] 薛晨阳[1,2] 晋玉剑[1] 仝晓刚[1] 韦丽萍[1] 刘超[1] 

机构地区：[1]中北大学电子测试技术国防科技重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2013年第2期27-29,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(61076111);国家自然科学基金项目科学仪器基础研究资助项目(61127008)

摘　　要：针对目前纳米光波导传输中散射损耗严重的问题,详细分析了表面粗糙度与波导宽度对散射损耗的影响,给出了清晰的对应关系图。设计并采用MEMS工艺制备出纳米光波导结构,在此基础上对波导结构进行了表面粗糙度的测试,进一步提出采用高温热处理方法使波导表面粗糙度降低了3 nm左右。实验发现:高温热处理后的光波导结构其散射损耗降低到3.343 dB/cm。Aiming at current serious problem that scattering loss in nano-optical waveguide transmission,effect of surface roughness and waveguide width on scattering loss is analyzed in detail,and clear figure of corresponding relation is given.MEMS technique is designed and used to manufacture nano-optical waveguide structures.On the basis of this test of surface roughness of optical waveguide structure is taken.Moreover,waveguide surface roughness is reduced about 3nm by the hyperthermia heat treatment method.The experimental data shows that scattering loss is reduced to 3.343 dB/cm after hyperthermia.

关 键 词：光波导 散射损耗 微机电系统 表面粗糙度 

分 类 号：TP256[自动化与计算机技术—检测技术与自动化装置]