高灵敏度SCR微悬臂梁设计仿真  

Design simulation of micro-cantilever with high sensitive SCR

作　　者：李其昌[1] 王广龙[1] 高凤岐[1] 卢江雷[1] 张姗姗 王磊[3] 

机构地区：[1]军械工程学院,河北石家庄050003 [2]上海市计量测试研究院,上海200233 [3]中国科学院微电子所,北京100029

出　　处：《传感器与微系统》2013年第1期95-98,101,共5页Transducer and Microsystem Technologies

摘　　要：利用有限元仿真分析方法,模拟不同特征应力集中区域(SCR)对微悬臂梁测量性能的影响,得出微悬臂梁结构引入不同形式特征SCR后所产生的测量性能的变化规律,分析灵敏度与测量带宽及测量范围的取舍原则。对基于微悬臂梁的高灵敏度微传感器、制动器的设计与优化具有一定指导意义。Finite element simulation method is used to simulate the effect of different characteristics of the stress concentration regions（SCR）on the measure performance of the micro-cantilever.The accepting or rejecting rule of the sensitivity and bandwidth and range of measurement are analyzed,the variation rule of measurement performance after the introduction of different formal features of SCR is given.It has some guiding significance to design and the optimization of the micro-cantilever-based microsensor and actuator.

关 键 词：微悬臂梁 高灵敏度 应力集中区域 有限元仿真 

分 类 号：TH703[机械工程—仪器科学与技术]