用于微动工作台的光纤位移传感器设计  

Design of optical fiber displacement sensor for micromotion worktable

作　　者：韦宣[1] 乐静[1] 申阿维[1] 邵伟[1] 

机构地区：[1]西安理工大学机械与精密仪器工程学院,陕西西安710048

出　　处：《传感器与微系统》2013年第1期115-117,共3页Transducer and Microsystem Technologies

基　　金：陕西省自然科学基金资助项目(SJ08E219);陕西省教育厅自然科学基金资助项目(09JK624)

摘　　要：针对微动工作台定位中遇到的位移检测问题,探讨了一种反射式光纤位移传感器。通过分析光纤耦合原理设计了发射接收光纤探头的结构;选择高亮度LED和高灵敏度硅光电池,提高了传感器的抗干扰能力和增强了信号强度;检测电路实现了对信号的去零、放大,从而提高分辨率,解决了这类传感器的线性范围小所引起的不足。实验结果表明:在0～200μm的量程内分辨率能达到亚微米级。A reflective optical fiber displacement sensor is studied,aiming at displacement detection problems encountered in positioning of micromotion worktable.Transmitting and receiving optical fiber probe structure is designed by analyzing the optical fiber coupling principle.High-brightness LED and high-sensitivity silicon photo cell are selected to improve anti-interference ability and to enhance signal intensity.The detecting circuit realizes zero-suppression,and amplification of the signal,thereby improves the resolution and solve the insufficient due to smaller linear range of the sensors.The experimental results show that sensor can achieve sub-micron resolution in the range 0-200 μm.

关 键 词：光纤位移传感器 亚微米 微动工作台 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]