调制结构对c-VC/h-TiB_2纳米多层膜的超硬效应的影响  

Influence of modulation structure on the superhardness effect in c-VC/h-TiB_2 nanomultilayer

作　　者：李玉阁[1] 李冠群[1] 李戈扬[1] 

机构地区：[1]上海交通大学,金属基复合材料国家重点实验室,上海200240

出　　处：《物理学报》2013年第1期356-360,共5页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:51071104);国家重点基础研究发展计划(批准号:2012CB619601)资助的课题~~

摘　　要：通过磁控溅射法制备了一系列不同调制结构的c-VC/h-TiB2纳米多层膜,采用X射线衍射仪、高分辨透射电子显微镜和纳米力学探针表征了多层膜的微结构和力学性能,研究了纳米多层膜调制结构与超硬效应的关系.基于实验研究结果,建立了立方结构VC和六方结构TiB2组成纳米多层膜时调制结构与硬度的关系图,该图分为四个区域,超硬效应产生于具有明锐界面和共格生长结构的区域中,而在其他区域内调制结构的改变将导致多层膜微结构发生变化,使得硬度相应降低.这一关系图可为类似异结构纳米多层膜获得超硬效应的调制结构设计提供参考.In order to reveal the relationship between modulation structure and superhardness effect, a series of c-VC/h-TiB2 nanomulti- layers with different modulation structures is synthesized by magnetron sputtering technique. X-ray diffractometer, high-resolution transmission electron microscope and nanoindention device are employed to investigate the microstructures and mechanical properties of the multilayers. Based on the experimental results, a relation map of modulation structure and superhardness effect is established for the nanomultilayer composed of c-VC and h-TiB2 with four regions. In these regions, superhardness effect could be generated only in the region with sharp interface and coherent growth structure. In other regions, the change of modulation structure leads to the change of the microstructure, and the hardness will decrease accordingly. The map could provide reference for obtaining superhardness effect by designing modulation structure in those analogous heterogenous nanomultilayers.

关 键 词：纳米多层膜 超硬效应 调制结构 共格生长结构 

分 类 号：O484.43[理学—固体物理]