Fe,Co共掺杂ZnO薄膜结构及发光特性研究  

Crystal structures and optical properties of(Fe, Co)-codoped ZnO thin films

作　　者：张丽[1] 徐明[1] 余飞[1] 袁欢[1] 马涛[1] 

机构地区：[1]西南民族大学电气信息工程学院和信息材料四川省重点实验室,成都610041

出　　处：《物理学报》2013年第2期513-520,共8页Acta Physica Sinica

基　　金：四川省学术和技术带头人培养基金(批准号:25727501);西南民族大学研究生学位点建设项目(批准号:2012XWD-S0805);西南民族大学研究生创新型科研项目(批准号:CX2013SZ03)资助的课题~~

摘　　要：采用溶胶凝胶法在玻璃衬底上制备了Fe,Co共掺Zn_(0.9)FexCo_(0.1-x)O(x=0,0.03,0.05,0.07)系列薄膜.通过扫描电镜(SEM)、X射线衍射(XRD)、X射线光电子谱(XPS)和光致发光(PL)谱对薄膜样品的表面形貌、晶体结构、成分和光学性能进行了研究.XRD结果表明所有ZnO薄膜样品都呈六方纤锌矿结构,在样品中没有观察到与Fe和Co相关的团簇,氧化物及其他杂相的衍射峰,表明共掺杂改善了Fe或Co在ZnO的分散性.XPS测试结果揭示样品中Co离子的价态为+2价;Fe离子的价态为+2价和+3价共存,但Fe相对浓度的增大导致Fe^(3+)含量增加.所有样品的室温光致发光谱(PL)均观察到紫外发光峰和蓝光双峰,其中Fe,Co共掺ZnO薄膜的紫外发光峰较本征ZnO出现蓝移,蓝光双峰峰位没有变化,但发光强度有所减弱;而掺杂ZnO薄膜的绿光发光峰几乎消失.最后,结合微结构和成分分析对薄膜样品的发光机理进行了讨论.The Fe, Co-codoped Zn0.9FexCo0.1-xO （x = 0, 0.03, 0.05, 0.07） thin films are fabricated on the glass substrates by sol-gel method. The surface morphologies, crystal structures, elements and optical properties of the films are investigated using scanning electron microscopy （SEM）, X-ray diffraction （XRD）, X ray photoelectron spectroscopy （XPS） and photoluminescence （PL） spectrum. The XRD results reveal that all the ZnO films are of wurtzite structure. The diffraction peaks of the clusters, oxide or other impurity phase related to Fe and Co are not observed in the samples. This indicates that codoped is beneficial to the improvement on the dispersion of Fe or Co in ZnO. XPS results reveal that Co elements exist as Co^2＋, Fe elements exist as Fe^2＋ and Fe^3＋, but the increase of relative concentration of Fe leads to the increase of Fe^3＋ content. The ultraviolet emission peak and blue double emission are observed in the PL spectra of all the samples. Compared with the undoped ZnO film, the Co-codoped ZnO film has a blue shift of ultraviolet emission peak of Fe, the unchanged position of the blue double emission peak, and the weakened luminous intensity. Moreover, the green luminescence peak of the doped ZnO film almost disappears. Finally, the luminescence mechanisms ofFe, Co-codoped ZnO films are discussed by combining the microstructures and compositions of the samples.

关 键 词：ZNO薄膜 溶胶-凝胶法 掺杂 光致发光 

分 类 号：O484.1[理学—固体物理]