消色差谐衍射微透镜列阵的应用研究  

APPLICATION RESEARCH FOR ACHROMATIC MULTIORDER DIFFRACTIVE MICROLENS ARRAY

作　　者：杜春雷[1] 白临波[1] 邱传凯[1] 王永茹[1] 潘丽[1] 

机构地区：[1]中国科学院光电技术研究所,微细加工光学技术国家重点实验室,成都610209

出　　处：《光子学报》2000年第5期426-430,共5页Acta Photonica Sinica

摘　　要：本文研究菲涅耳谐衍射透镜的特性和工作条件 ,分析二元谐衍射透镜的衍射效率及制作要求 ,设计并研制了用于萨克 -哈特曼波前传感器的双波长共焦谐衍射微透镜列阵 ,得到了良好的应用效果 .The spectral properties and the configuration parameters of multiorder diffractive lens have been studied in the paper.For fabricating the lens and lens array with binary profile,a design method was discussed to determine the phase depth factor and other parameters according to the requirement of chromatic tolerance,the diffractive efficiency as well as and fabricating limitation.As an application,a ring type microlens array was designed and fabricated for working at two wavelengths in the system of Shack Hartmann sensor,satisfied result was obtained at two selected wavelengths.

关 键 词：谐衍射透镜 多波长共焦 衍射效率 

分 类 号：O436.1[机械工程—光学工程] TH74[理学—光学]