透明导电ZnO薄膜的电化学制备及性能研究  

Transparent Conductive Properties of ZnO Thin Films Prepared by Electrochemical Deposition

作　　者：孙芳芳[1] 贺蕴秋[1,2] 李一鸣[1] 李乐[1] 储晓菲[1] 黄河洲[1] 

机构地区：[1]同济大学材料科学与工程学院,上海200092 [2]同济大学先进土木工程材料教育部重点实验室,上海200092

出　　处：《发光学报》2013年第2期218-224,共7页Chinese Journal of Luminescence

基　　金：国家自然科学基金(50672066)资助项目

摘　　要：以修饰的ITO玻璃为衬底,以不同浓度Zn(NO3)2.6H2O作为电解质溶液,采用阴极恒流沉积法制备了不同纳米结构的ZnO薄膜。用X射线衍射(XRD)、场发射扫描电镜(FE-SEM)、四探针仪(RTS-8)、紫外-可见(UV-Vis)光谱仪、循环伏安等分别表征薄膜的晶相、形貌和厚度、方块电阻、紫外-可见光透过率和氧化还原电位。结果表明:低浓度溶液沉积得到的c轴取向1D ZnO纳米柱和高浓度溶液沉积得到的致密2D六方ZnO纳米片在可见光范围(400～900 nm)的透过率均可高达85%以上,方块电阻约为14.5Ω/□。两种结构的氧化还原电位有显著区别,纳米柱的为-0.54 V(vs.SCE),而纳米片的为-0.72 V(vs.SCE),说明纳米片状的ZnO薄膜具有更为良好的化学稳定性。By using the constant-current electrochemical method,nanostructure ZnO was deposited on the modified ITO substrate.the relationship between Zn（NO3）2·6H2O concentration and the morphology,the crystalline phases,morphology and thickness,sheet resistances,transmittance,the oxidation and reduction potential were researched by XRD,FE-SEM,RTS-8,UV-Vis,Cyclic Voltammetry.The results indicated that one-dimensional（1D） nanopillars were prepared by low concentration of electrolyte,whereas two-dimensional（2D） nanodisks with compact hexagonal were obtainted by high concention of electrolyte.UV-Vis spectroscopy revealed that the transmittance of ZnO nanopillars and nanodisks were more than 85% at the range of 400～900 nm,RTS-8 analysis indicated that sheet resistances of ZnO thin films are about 14.5 Ω/□,Cyclic Voltammetry analysis indicated significant differences of the potentials of oxidation and reduction between two kinds of morphology,whose ZnO nanopillars were-0.54 V（vs.SCE）and ZnO nanodisks were-0.72 V（vs.SCE）,respectively.The results revealed that ZnO thin films with nanodisks had better chemical stability.

关 键 词：ZNO薄膜 恒电流 修饰 透明电极 

分 类 号：O642[理学—物理化学]