InP based DFB laser array integrated with MMI coupler  

作　　者：ZHU HongLiang MA Li LIANG Song ZHANG Can WANG BaoJun ZHAO LingJuan WANG Wei 

机构地区：[1]Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences [2]Department of Electronic Engineering,Tsinghua University

出　　处：《Chinese Science Bulletin》2013年第7期573-578,共6页

基　　金：supported by the National Hi-Tech Research and Development Program of China ("863" Project)(Grant Nos. 2011AA010303,2012AA012203);the National Basic Research Program of China ("973" Project)(Grant No. 2011CB301702);the National Natural Science Foundation of China (Grant Nos. 61021003,61090392)

摘　　要：The techniques used for the fabrication of photonic integrated circuit(PIC) chip are introduced briefly.Then a four channel DFB laser array integrated with MMI coupler and semiconductor optical amplifier(SOA) fabricated with butt-joint technique,varied ridge width and holographic exposure techniques is reported.The techniques used for the fabrication of photonic integrated circuit （PIC） chip are introduced briefly. Then a four channel DFB laser array integrated with MMI coupler and semiconductor optical amplifier （SOA） fabricated with butt-joint technique, varied ridge width and holographic exposure techniques is reported.

关 键 词：光子集成电路 激光器阵列 耦合器 MMI DFB INP基 半导体光放大器 对接技术 

分 类 号：TN929.11[电子电信—通信与信息系统] TN248.4[电子电信—信息与通信工程]