单频激光干涉仪中偏振分光棱镜误差与补偿  

Errors and Compensations of Polarization Splitting Prism in Single Frequency Laser Interferometer

作　　者：魏勇 杨军 

机构地区：[1]哈尔滨工程大学纤维集成光学教育部重点实验室(筹),黑龙江哈尔滨150001

出　　处：《光学学报》2012年第F12期147-153,共7页Acta Optica Sinica

基　　金：国家自然科学基金（60927008,41174161）和科技部国际合作专项（2010DF22770,2011DFB11520）资助课题.

摘　　要：提出了单频激光干涉仪中偏振分光棱镜（PBS）误差的在线补偿方法。研究了入射条件对PBS偏振特性的影响，定量给出了斜入射时PBS的琼斯矩阵；研究了PBS的偏振误差对单频激光干涉仪的影响，通过对光源输入光偏振态和PBS入射角度的调制，实现了PBS误差的在线补偿，提升了干涉信号的对比度，抑制了单频激光干涉仪的非线性误差。研究表明，该方法可以有效补偿PBS的偏振误差，改善干涉信号质量，提高干涉仪的测量分辨率，可被广泛应用于纳米高精度激光干涉仪的研究与制备等领域。An online compensation method of polarization splitting prism （PBS） error in single frequency laser interferometer is presented. The effect of incident conditions on polarization characteristics of PBS is studied, the Jones matrix is quantitatively given out at the condition single frequency laser interferometer is discussed. By of oblique incidence. And the effect of polarization error on modulating polarization state of incident light and incident angle of PBS, online compensation of PBS error is realized. Meanwhile, the contrast ratio of interference signal is improved and the nonlinear errors of single frequency laser interferometer are depressed. The experimental results show that this method can effectively compensate polarization error of PBS, improve the quality of interference signal, raise measuring resolution of interferometer, and can be widely used in the fields of the research and preparation of high-precision nanometer laser interferometer.

关 键 词：测量 激光干涉仪 偏振分光棱镜 偏振误差 在线补偿 琼斯矩阵 

分 类 号：O436[机械工程—光学工程]