微谐振器结构性能的有限元分析  

Finite Element Analysis of Oscillating Microresonators

作　　者：孙科[1] 宫海波[1] 亓盛元[1] 

机构地区：[1]中国飞行试验研究院,陕西西安710089

出　　处：《计算机仿真》2013年第2期89-92,共4页Computer Simulation

摘　　要：微谐振器是试飞测试系统的重要组成部件,微谐振器的性能影响到试飞测试系统的精确度。为了提高微谐振器的性能,在传统结构的基础上,提出改变微谐振器中折叠梁、驱动梳齿等结构的尺寸来改善其性能。运用有限元法对不同结构尺寸下的微谐振器进行模态、品质因子分析。仿真结果表明,横向微谐振器的一阶模态频率的大小很大程度上受到折叠梁尺寸的影响;静电梳齿的尺寸设计中,梳齿的宽度是影响驱动力和品质的一个关键因素。仿真结果表明,对提高微谐振器的性能具有一定的指导意义。The micro- resonator is the key component of the flight test system, the performance of the micro -resonator affects the accuracy of the flight test system. In order to improve the performance of the micro - resonator, based on the traditional structure, this paper proposed a method which changs the size of the folding beam and the drive comb structure in micro -resonator. By using finite element method, we analysed the micro resonator＇s modal and quality factor at different dimensions. The simulation results show that the first - order modal frequency of the transverse micro - resonator is largely affected by the size of the folded beam. In the design of the electrostatic comb＇ size, the comb width is a key factor that affects the driving force and the quality factor. Ideas and the simulation results in this paper have a guiding significance for improving the performance of the micro - resonator.

关 键 词：微谐振器 折叠梁 有限元 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]