基于MEMS的双模矩形波导滤波器的设计  

Design of Dual-mode Rectangular Waveguide Filter Based on MEMS Processing

作　　者：纽莉荣[1] 郭晨[2] 蒋延生[1] 张安学[1] 

机构地区：[1]西安交通大学电信学院,西安710049 [2]长安大学信息工程学院,西安710064

出　　处：《空间电子技术》2012年第4期94-98,共5页Space Electronic Technology

基　　金：博士后基金项目资助(编号:20110491639);中央高校基本科研业务费(编号:CHD2011JC049;CHD2011ZD004)

摘　　要：文章提出了一种应用MEMS工艺实现的新型小型化Ka波段滤波器。利用在腔内加载了切角的近似方形脊的矩形波导结构实现双模滤波,有效地减小滤波器的尺寸。采用双腔结构构成了四阶滤波器,实现了较宽的带宽和较好的选择性。输入输出采用正方形同轴结构,易于加工,而且可以进一步减小滤波器尺寸。通过在HFSS中建立模型并仿真,得到了较满意的结果。A novel compact Ka-band filter based on MEMS process is proposed in this paper. Rectangular waveguide structure loaded with a cutaway nearly-square ridge is applied to achieve dual-mode filtering, which can efficiently reduce size of the filter. Moreover, since the filter is made up of double cavity structure to achieve four-order, it possesses wide bandwidth and preferable selectivity. In addition, the input and output ports with square coaxial structure are easy process- ing and can further decrease the filter＇s size meanwhile. The filter model is established and simulated with HFSS, and the results show that this design is valuable and feasible.

关 键 词：KA波段 双模滤波器 MEMS工艺 矩形波导 近似方形脊 

分 类 号：TN713[电子电信—电路与系统]