基于MEMS加工工艺的同轴腔体滤波器设计  

Design of Coaxial Cavity Filter Based on MEMS Processing

作　　者：王研[1] 郭晨[2] 蒋延生[1] 张安学[1] 

机构地区：[1]西安交通大学电信学院,西安710049 [2]长安大学信息工程学院,西安710064

出　　处：《空间电子技术》2012年第4期108-112,122,共6页Space Electronic Technology

基　　金：博士后基金项目资助(编号:20110491639);中央高校基本科研业务费(编号:CHD2011JC049;CHD2011ZD004)

摘　　要：为了实现无线电通信系统小型化的需求,文章提出了一种基于MEMS加工工艺的六腔同轴腔体滤波器的设计方案。该设计使用ansoft HFSS完成滤波器模型建立,进一步利用ansoft designer与ansoft HFSS联合仿真,优化并实现滤波器模型设计。结合MEMS加工工艺的特点,尽量简化同轴腔体滤波器结构,并采用方同轴线实现输入输出端口设计。A design of a six-degree coaxial cavity fiher based on MEMS process is presented in this paper, which can satisfy the requirement of miniaturizing the radio communication system. The filter model is established with Ansoft HFSS, and fur- ther simulated with Ansoft Designer and Ansoft HFSS co-simulation to achieve optimization. Benefiting from the ch aracteris- tics of MEMS process, the structure of the coaxial cavity filter is well simplified. Meanwhile, square coaxial is applied to design input and output ports.

关 键 词：同轴腔体滤波器 MEMS加工工艺 方同轴线 联合仿真 

分 类 号：TN713[电子电信—电路与系统]