基于声表面波器件的无源传感器的研究  

Study on Passive Sensor Based on SAW Device

作　　者：程卫东[1] 董永贵[1] 王生江[1] 潘海峰[1] 李源[1] 冯冠平[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京市100084

出　　处：《仪表技术与传感器》2000年第6期1-3,13,共4页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目!No.596 750 84;国家"九五"攀登计划预选项目!PD952 190 8Z2

摘　　要：利用声表面波器件的高频压电转换特性 ,研究设计了一种可实现无线访问的时间延迟型无源传感器。为提高回波信号的信噪比 ,在SAW器件的设计中 ,采用了一种并联式的新型结构以替代传统的共线式结构。利用一套射频访问系统 ,本文重点针对器件的力敏特性进行了实验研究。实验表明 ,合理地设计器件中ID -Tag与反射栅的参数 ,可稳定地测出器件上SAW的传播参数 ,测量结果不受器件与访问系统间距离的影响。利用这一原理 。A passive reflective delay line sensor, which can be interrogated by a wireless measurement system, is designed by using high frequency piezoelectricity transform characteristics of the surface acoustic wave device. Instead of conventional layout, a new parallel layout is adopted to gain high Signal-to-Noise ratio in designing the SAW device. In this paper, the experiment for force sensitivity characteristic of this device is carried out through using a set of RF interrogable system. Experiment shows that SAW propagation parameters on the device may be measured precisely by designing parameters of SAW device optimally, and the result of measurement is not affected by distance between the system and the device. By using this principle, many kinds of wireless passive sensors can be manufactured.

关 键 词：无源传感器 无线访问系统 声表面波器件 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]