低误差灵敏度的高性能激光偏振分光膜的稳健设计  

Robust Design of a High-Performance Laser Thin-Film Polarizing Beam Splitter with Low Layer Errors Sensitivity

作　　者：吴素勇[1] 杨开勇[1] 谭中奇[1] 

机构地区：[1]国防科学技术大学光电科学与工程学院激光陀螺研究所,湖南长沙410073

出　　处：《光学学报》2013年第2期294-300,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61205157)资助课题

摘　　要：基于膜系误差灵敏度主动控制的稳健设计思想,对比研究了一种新型正交偏振双频激光器中高性能偏振分光膜(PBS)不同应用方案的误差响应特性。发现了决定其膜层参数误差灵敏度的本质因素,找到了一种低误差灵敏度的高性能激光PBS方案,其膜系结构简单,易于低成本高成品率的批量生产,对该双频激光器的研制、工程化及应用将起到积极作用。According to the robust design method of multilayer optical coatings based on layer errors sensitivity control concept, the spectral characteristics responding to layer parameters errors are researched comparatively within three different application solutions of a high-performance thin-film polarizing beam splitter （PBS） in a novel orthogonal polarized dual-frequency laser. The inherent factor of film errors sensitivity of laser PBS is found by elaborately arranged numerical robust design experiments. A low layer errors sensitivity thin-film structure is robust designed for the high-performance laser PBS with moderate layer number and easy-manufacturable layer thicknesses. This PBS design solution is very suitable for mass production at low cost and high yield, which will play a positive role in the development, engineering and application of the orthogonal polarized dual-frequency laser.

关 键 词：薄膜 激光偏振分光膜 稳健设计 误差灵敏度 

分 类 号：O484.4[理学—固体物理]