基于动态模糊系统模型的压电陶瓷驱动器控制  

Control of piezoelectric ceramic actuator via dynamic fuzzy system model

作　　者：李朋志[1] 葛川[1] 苏志德[1,2] 闫丰[1] 隋永新[1] 杨怀江[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033 [2]中国科学院大学,北京100039

出　　处：《光学精密工程》2013年第2期394-399,共6页Optics and Precision Engineering

基　　金：02重大专项资助项目(No.2009ZX02205)

摘　　要：针对压电陶瓷驱动器(PZT)的迟滞非线性对周期性超精密跟踪精度的影响,对基于Takagi-Sugeno(T-S)型模糊规则的动态模糊系统(DFS)前馈+PI控制方法进行了研究。介绍了DFS模型前提部分和结论部分的辨识方法;结合直接逆模型控制和迭代学习控制的思想,提出了周期性轨迹跟踪的DFS前馈+PI控制方法。最后,针对20Hz的三角波和正弦波期望轨迹进行了跟踪控制实验。实验结果表明:提出的控制方法对三角波和正弦波期望轨迹的最大跟踪误差分别为0.25%和0.27%,相对于PI控制,跟踪精度分别提高了52倍和64倍,而最大跟踪绝对误差分别降低到5.1nm和5.5nm。结果显示这种控制方法易于实现,周期性轨迹跟踪精度高。As the nonlinear hysteresis characteristic of a Piezoelectric Ceramic Actuator（PZT） has a big impact on periodic ultra-precise tracking accuracy,this paper investigates a methodology which combines the Dynamic Fuzzy System（DFS） feed-forward based on Takagi-Sugeno（T-S） fuzzy rule with the PI control.The identification methods of DFS antecedent and consequent structures are introduced.Then,DFS feed-forward with PI control strategy of periodic trajectory tracking is proposed according to theories of direct inverse model control and iterative learning control.Finally,the tracking control experiment is performed on a 20Hz triangular trajectory and a sinusoidal desired trajectory.Experimental results indicate that the proposed control method can achieve 0.25% and 0.27% maximum tracking errors for triangular and sinusoidal trajectories,which are 52 and 64 times as accurate as that of PI control.Moreover,the maximum absolute tracking errors have been reduced to 5.1 nm and 5.5 nm,respectively.It concludes that the methodology can be easily implemented and has high periodic trajectory tracking accuracy.

关 键 词：压电陶瓷驱动器(PZT) 迟滞 动态模糊系统 前馈 轨迹跟踪 

分 类 号：TP273.1[自动化与计算机技术—检测技术与自动化装置] TN384[自动化与计算机技术—控制科学与工程]