基于LVDT的台阶信号拾取方法研究  

Signal Acquiring in Step Height Measurement with LVDT Transducer

作　　者：白立芬[1] 李庆祥[1] 薛实福[1] 于水[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京市100084

出　　处：《仪表技术与传感器》2000年第7期37-38,46,共3页Instrument Technique and Sensor

摘　　要：大规模集成电路检测设备之一台阶测量仪是采用LVDT传感器拾取信号的 ,其设计合理与否直接关系到仪器的测量精度。文中采用零点残余电压补偿 ,合理地选择LVDT特性曲线的不同区域 ,以及正确设计传感器的安装角度等措施 ,有效地减小了零点残余电压的影响 ,并消除测量机构本身固有的二次项误差 ,提高了仪器的测量精度。实验表明 ,该仪器垂直方向测量分辨率可达 0 .5 μm ,重复测量精度为± 0 0 1 5 μm .Step height measurement instrument, was one of the LSI test equipment, and the step height signal can be acquired using LVDT transducer. The LVDT's reasonability is the key to the equipment. To compensate the zero voltage, to select the characteristic curve region of LVDT properly and to design the angle between transducer and measuring lever can improve the measuring accuracy dramastically. The experimental results show that its vertical resolution is 0.5nm and the repeatability is ±0.015μm.

关 键 词：台阶测量仪 集成电路 LVDT传感器 信号拾取方法 

分 类 号：TN407[电子电信—微电子学与固体电子学]