基于滤波的准直光束漂移反馈补偿方法研究  

Study on method of feedback compensation drift of collimation beam based on filter

作　　者：李结安[1] 谭久彬[1] 崔继文[1] 

机构地区：[1]哈尔滨工业大学超精密光电仪器工程研究所,黑龙江哈尔滨150080

出　　处：《光电子．激光》2013年第2期336-342,共7页Journal of Optoelectronics·Laser

摘　　要：针对光束漂移对超精密激光准直测量影响大且其难以从实际测量信号中有效提取的问题,提出一种基于滑动均值滤波的准直光束漂移反馈补偿方法。方法通过滑动均值滤波器抑制干扰噪声影响,从实际微弱检测信号中有效提取出其中的光束漂移成分及其变化趋势,并将其作为反馈量;进而利用压电偏转镜对光束漂移量进行实时反馈补偿,以抑制其对激光准直测量稳定性的影响。实验结果表明,经本文方法补偿的激光器出射光束在140s内1m准直距离处,光束漂移量标准差X方向从2.66×10-8 rad下降到4.13×10-9 rad,Y方向从1.74×10-8 rad下降到3.97×10-9rad,有效地提高了激光准直测量光束的方向稳定性。To solve the problem that beam drift errors have a significant impact on the performance of ul- tra-precision laser collimation measurement systems and they are difficult to be extracted, a real-time compensation method is presented based on average filter. In this method, the influence of interference noise is suppressed with a moving average filter, and useful beam drift signal and its trend, as compensa- tion variation, are effectively extracted from actual weak detection signals. In this way, beam drift is then real-time feedback compensated by using of a Piezoelectric tilting mirror system,in order to suppress its impact on the stability of laser collimation systerr~ Experiment results indicates that：when the output beam is tested in this method with distance of lm over 140 second,the standard deviation of beam drift in X direction is decreased from 2.66 ×10-8 rad to 4.13 ×10- 9 rad, and in Y direction from 1.74 ×10- 8 rad down to 3.97 ×10-9 rad. In another word,the directional measurement stability is effectively improved for the laser collimation measurement system.

关 键 词：激光准直 光束漂移 反馈补偿 滑动均值滤波 

分 类 号：TN247[电子电信—物理电子学]