图像处理在单晶硅直径检测中的应用  

Application of Image Processing in Crystal Diameter Detection

作　　者：梁琛[1] 应骏[1] 

机构地区：[1]上海师范大学信息与机电工程学院,上海200234

出　　处：《电视技术》2013年第5期189-191,共3页Video Engineering

摘　　要：获取单晶硅边缘特征信息是测量其直径的前提。使用CCD摄像头采集部分等径阶段的单晶硅视频图像,并通过一系列图像处理的方法定位其边缘。首先用三次样条法对所摄取的图像进行插值放大以提高图像的分辨率,再使用中值滤波处理以减少边缘模糊现象以及噪声的产生,然后分析图像直方图,选取适当的阈值,把光圈与背景图像分割开来,并使用Canny算子提取单晶硅边缘,得到的边缘光滑、连通,为进一步检测单晶硅直径创造了良好的条件。Acquisition of crystal image edge is the premise of diameter detection. In this paper, the partial seeding step image of crystal is collected by CCD camera and location of crystal edge is acquired by a series of image processing. Flatly, the image shouht be enlarged by cubic spline interpolation in order to increase resolution of the image. Secondly, median filtering is used to reduce the image noise and blurring of the edge. Then, aperture and background image can be separated by analyzing histogram and selecting the threshold value. Finally, the edge of crystal is available to be obtained by u- sing Canny, and the smooth and continue edge creates good condition for crystal diameter detection further.

关 键 词：单晶硅 提高分辨率 图像处理 

分 类 号：TN911.73[电子电信—通信与信息系统] TP391[电子电信—信息与通信工程]