防静电地面的防静电电阻测量不确定度评定  

Uncertainty evaluation of anti-static floor's anti-static resistance

作　　者：葛欣宏[1] 贺庚贤[1] 宁飞[1] 顾营迎[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,长春130033

出　　处：《电子测量技术》2013年第2期16-18,42,共4页Electronic Measurement Technology

摘　　要：防静电地面防静电电阻包括系统电阻和点对点电阻,是评价防静电工作区防静电能力的重要指标。在采用高绝缘电阻测试仪ZC-90D测量防静电地面系统电阻及点对点电阻的前提下,提出了防静电地面的防静电电阻测量不确定度评定的通用方法。首先,对防静电电阻的测量原理进行了分析,建立了测量结果的导出数学模型,并确定了两类测量不确定度来源;其次,进行了防静电电阻的测量不确定度评定;最终,在防静电电阻测量值的范围较宽的情况下,推导出了通用的不确定度计算公式,从不确定度理论上保证了防静电电阻测量的准确性。Anti-static floor's anti-static resistance including point-to-point resistance and resistance of grounding system,it is an important indicator for anti-static work area.Adopt the high insulation resistance measuring instrument measuring the anti-static resistance of EPA;the paper has proposed universal method of anti-static resistance's measurement uncertainty evaluated.Firstly,analyze the measurement principle of the anti-static resistance,and establish the deriving mathematical model of measurement results,determine the source of two types measurement uncertainty.Secondly,evaluate measurement uncertainty of anti-static resistance.Finally,derive universal uncertainty formula,ensure the measurement accuracy of the anti-static floor's anti-static resistance from uncertainty theoretically.

关 键 词：防静电地面 防静电电阻 高绝缘电阻测量仪 不确定度 

分 类 号：TB97[一般工业技术—计量学]