提高激光干涉测量精度的研究  

Improving the Accuracy of Laser Interferometry

作　　者：李东光[1] 张国雄[2] 李贵涛[1] 

机构地区：[1]北京理工大学机电工程系,北京100081 [2]天津大学精密仪器及光电子工程学院,天津300072

出　　处：《北京理工大学学报》2000年第5期621-625,共5页Transactions of Beijing Institute of Technology

基　　金：国家自然科学基金!(5 96 0 5 0 18)

摘　　要：空气折射率的补偿效果在高精度激光干涉测量中起着瓶颈的作用 ,解决空气折射率的高精度测量问题有助于激光干涉测量精度提高 .用一种电容传感器测量空气介电常数而相对测量空气折射率 ,进而通过计算机多点测量补偿装置提高激光干涉测量的测量精度 .仅用一种传感器反映几种空气参数及其成分的变化对空气折射率的影响 ,测量装置简单 ,测量环节的误差源少 。The compensation effect of refractive index of air is the “bottle neck” factor in high accurate interferometry. To measure the refractive index of air accurately is helpful to improve the accuracy of laser interferometry. A multi point computer compensation device for improving the accuracy of laser interferometry based on measuring the dielectric coefficient of air using capacitance sensors to get the refractive index of air indirectly is studied. The compensation device is simple and there are few error sources in measurement links. It is testified by performed experiments that the accuracy of compensated values is improved compared with uncompensated ones.

关 键 词：激光干涉测量 空气折射率 测量精度 

分 类 号：TH744.3[机械工程—光学工程]