光刻投影物镜中柔性多弹片支撑方式的性能分析  

Performance Index Analysis of the Support of Lithographic Lens with Multi Flexural Brackets

作　　者：彭海峰[1] 巩岩[1] 赵磊[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《光电工程》2013年第2期71-75,共5页Opto-Electronic Engineering

基　　金：国家重大专项基金资助项目(2009ZX02205)

摘　　要：大口径光学元件的支撑技术是精密光学仪器的关键技术之一,在精密光学仪器的光学元件支撑中,多弹片支撑因其能使光学元件均匀受力且能够较好的消除热像差而得到很多应用。本文针对一种L形多弹片光学元件支撑结构做了结构设计,并对通过相应的理论推导,得到其力学性能与主要几何参数的关系;以一种典型镜片为例,对镜片在三十六点支撑方式下发生的轴向位移和镜片面形的变化做了分析,得到了轴向位移和镜片面形与弹片的三个主要几何参数的关系。结果表明,在通光口径允许情况下,可以使支撑点距离中心的距离和弹片的宽度缩短以使镜片的面型变好。本文的研究结果为这种支撑结构的实际应用提供了支持和参考。The support of large aperture optical lens is one of the key technologies of the precision optical instrument. The support with multi flexural brackets is widely used in the support of the optical lens because it can eliminate the thermal aberration efficiently and make the lens act with uniform stress. A structure of a support of optical lens is designed with L-shape multi flexural brackets. A theoretical derivation of its mechanic index is also presented. Take a typical lens as an example, the relationship of the number of brackets and the lens aberration is also given. The results indicate that we can set the distance between the center of the lens and the support point closer and the length of the brackets shorter to to make the aberration of the lens better. At last, the relationship and the geometric indexes of the support is obtained. The results of this article can be the references for the applications of the support with multi brackets.

关 键 词：光刻投影物镜 多弹片支撑结构 自重变形 面形分析 

分 类 号：TH16[机械工程—机械制造及自动化]