基于铁基非晶态合金细丝的微压力传感器  

Micro-Pressure Sensor Based on Fe-Base Amorphous Alloy Wire

作　　者：石延平[1] 范书华[1] 臧勇[1] 

机构地区：[1]淮海工学院机械系,江苏连云港222005

出　　处：《仪表技术与传感器》2013年第2期7-9,共3页Instrument Technique and Sensor

基　　金：江苏省海洋资源开发研究院科技开放基金项目(JSIMR09B07)

摘　　要：对一种利用Fe基非晶态软磁合金细丝作为敏感材料的新型微压磁式压力传感器进行了可行性研究。介绍了这种传感器的结构、工作原理、输出特性以及主要参数的选择。通过试验,分析了传感器的静态特性。试验结果表明:这种传感器的最大线性误差为1.11%F.S,最大不重复误差为0.85%F.S,未经放大的最大灵敏度为2.19 mV/kPa.另外,这种传感器结构简单,工作可靠。A new kind of micro-pressure sensor took Fe-base amorphous alloy wire as sensitive ring was discussed. At first its operation principle, structure, output characteristic and the choice of some major parameter were discussed. Then through the pressure experiment, the sensor＇ s static characteristic was analyzed. The experimental result shows the sensor＇ s the maximum linearity error is 1.11% F. S , the maximum repetitive error 0. 85% F. S, the maximum sensitivity unamplified is 2. 19 mV/kPa. In addition, the sensor has some characteristic such as simpler structure, good operational reliability.

关 键 词：微压力传感器 压磁效应 Fe基非晶态合金细丝 静态特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]