微米尺度悬浮式机电器件的电荷穿梭特性  

Electron Shuttle Characteristics of the Micrometer-Sized Floating Electromechanical Devices

作　　者：陈鹏[1] 孙建东[2] 秦华[2] 顾晓峰[1] 

机构地区：[1]江南大学电子工程系轻工过程先进控制教育部重点实验室,江苏无锡214122 [2]中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室,江苏苏州215123

出　　处：《微纳电子技术》2013年第4期206-209,263,共5页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11074280);中央高校基本科研业务费专项资金(JUDCF12032);江苏高校优势学科建设工程资助项目;江苏省六大人才高峰资助项目(DZXX-053)

摘　　要：研究限制在电极间并能做自由往复运动的微米尺度金属球的电荷穿梭特性,作为进一步研究纳米机电式穿梭器件的模型器件。通过测量不同电压下的穿梭电流,验证经典模型预测的电流与电压特性。精确测量实时的电荷穿梭信号脉冲,证明该系统中存在模型预测的电荷穿梭电流和模型未能预测的感应电流。通过对电极-微球-电极结构的电场模拟,揭示了产生感应电流的物理机制:微球与电极碰撞过程产生动态电容变化,形成瞬时的感应电流。通过测量不同电压下穿梭电流和穿梭频率的关系,修正了经典穿梭模型,给出了感应电流引起的电荷修正因子。As a model device used to further study nanometer-sized electron shuttle devices, the electron shuttle characteristics of the micrometer-sized metallic beads were studied. The beads were confined between two electrodes and can move to-and-fro freely. The current voltage cha racteristics predicted by classic model were verified through measuring the shuttle current under the different voltages. By monitoring the real-time electron shuttle signal pulse, the electron shuttle current predicted by classic model and the induction current unpredicted by classic model in the system were verified. Through an electric field simulation of the electrode-microsphere- electrode structure, the physical origin of the induction current was revealed. It is revealed that the dynamic capacitance change is generated during the collision of electrode and microsphere, and hence an instantaneous induction current is induced. By measuring the shuttle current and the shuttle frequency under the different voltages, the classic shuttle model was modified, and the charge correction factor induced by the induction current was provided.

关 键 词：机电式单电子晶体管(EMSET) 纳机电系统 电荷穿梭 感应电流 悬浮式 充放电流 

分 类 号：TN301.1[电子电信—物理电子学]