薄膜应力测量方法进展  

PROGRESS ON MEASUREMENT METHODS OF STRESS IN THIN FILM

作　　者：王生钊[1] 张丹[1] 

机构地区：[1]南阳理工学院电子与电气工程学院,河南南阳473004

出　　处：《南阳理工学院学报》2012年第4期67-72,共6页Journal of Nanyang Institute of Technology

基　　金：上海市特殊人工微结构材料与技术重点实验室项目(ammt2012A-11)

摘　　要：研究和总结测量薄膜应力的方法,根据测量薄膜的不同特征量将常用的测量方法分为Stoney公式法、微观测量法等方法。在这些方法中,X射线法、激光干涉法等精确度较高,牛顿环法在实验数据处理和操作上比较简便省时,光栅反射法和拉曼法则比较新颖,最后对各测量方法的优缺点和适用范围进行了总结。Film stress measurement methods of thin film are studied and summarized. According to the measurement of different thin film characteristics, film stress measurement methods are divided into Stoney formula method and micro-measurement method. In these methods, X-ray method, laser interferometer method have higher accuracy, while the Newton ring method has advantage in the experi- ment data treatment and relatively simple operation and time-saving. Grating reflection method and Raman method are relatively new. Finally, the advantages and disadvantages of various measurement methods and the scope of application are summarized.

关 键 词：薄膜应力 Stoney公式 曲率半径 

分 类 号：TH49[机械工程—机械制造及自动化]