光刻机外型设计新理念  

The New Shape Design Ideas of Lithography Machine

作　　者：蒋薇[1] 赵立新[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209

出　　处：《现代科学仪器》2013年第1期41-43,共3页Modern Scientific Instruments

摘　　要：光刻机是微纳器件的重要加工设备之一,推动着电子工业的不断发展。研发人员在设计过程中首要关注的是其功能的多样性、可靠性、实用性以及设备的经济性等方面。与其主要强调功能相比,外型设计往往容易被忽视,而良好的外型对用户的使用和感官意义重大。光刻机外型主要包括形态、色彩、材质、人机工程学、技术经济性以及绿色设计等方面,文章对此展开全面分析,提出了一套可行的光刻机外型设计理念。为光刻机外型设计指明了方向。Lithography machine is one of the important equipment in the nanoimprint technology.It promotes the development of the electronic industry.Research personnel always concern about the diversity of the function,reliability,practicability and economy of equipment in the design process.Compared with the main emphasis function,shape design is often neglected easily.And good appearance is of great significance during the moment when people use and feel.This article analyzes the lithography machine shape design through its appearance shape,color,material quality,ergonomics,technical economy and green design,and puts forward a set of feasible lithography machine shape design ideas.It makes a development for lithography machine shape design and points a clear direction.

关 键 词：光刻机 形态 色彩 材质 人机工程学 技术经济性 绿色设计 

分 类 号：TN305.7[电子电信—物理电子学]