双元检测法动态测定PSII靶温度  

WORKPIECE TEMPERATURE MEASUREMENT FOR PSII USING DOUBLE THERMOCOUPLES

作　　者：赵青[1] 耿漫[1] 童洪辉[1] 陈庆川[1] 霍岩峰[1] 孙爱萍[1] 穆莉兰[1] 郑永真[1] 

机构地区：[1]核工业西南物理研究院,成都610041

出　　处：《核聚变与等离子体物理》2000年第3期185-188,共4页Nuclear Fusion and Plasma Physics

基　　金：国防科技重点实验室基金!资助项目(98JS50.3.3HZ5 801)

摘　　要：研制了快速、准确、简单地测定 PSII靶温度的系统 ,提出了用双元检测法动态测量PSII靶温度的方法。实验表明 ,双元检测法测量温度准确、可靠 ,且测温系统成本低、稳定性好。A simple and convenient system used to measure the workpiece temperature fast and exactly for plasma source ion implantation (PSII) is developed.The method of dynamic workpiece temperature measurement using double thermocouples is introduced.The experimental results indicate that the method can measure exactly the workpiece temperature.This low cost system possesses excellent stability and gives precise measurements.

关 键 词：PSП 双元检测法 靶温度 

分 类 号：TL629.1[核科学技术—核技术及应用] TL659