退火温度和涂膜层数对溶胶-凝胶法制备ZnO薄膜微结构及光学特性的影响  

Influence of Annealing Temperature and Coating Layers on the Microstructure and Optical Properties of ZnO Thin Films Fabricated by Sol-gel Method

作　　者：袁欢[1] 徐明[1] 黄勤珍[1] 刘以良[1] 张丽[1] 

机构地区：[1]西南民族大学电气信息工程学院,信息材料四川省重点实验室,成都610041

出　　处：《人工晶体学报》2013年第3期516-520,528,共6页Journal of Synthetic Crystals

基　　金：四川省学术和技术带头人培养基金(25727501);西南民族大学研究生学位点建设项目(2012XWD-S0805)

摘　　要：采用溶胶-凝胶法在玻璃基片上制备了ZnO薄膜,研究了退火温度和涂膜层数对ZnO薄膜结晶性和光学特性的影响。扫描电镜(SEM)结果表明,退火温度的升高使得薄膜致密性和均匀性均得到改善。旋涂10层以上的薄膜其表面形貌明显要好于旋涂5层的薄膜样品,但旋涂10层和20层的薄膜其形貌和微结构差异并不显著。XRD图谱表明所有样品都具有纤锌矿结构,随着热处理温度的升高,各衍射峰强度增大,晶粒尺寸变大。光致发光(PL)测量显示,退火温度越高,涂膜层数越少,其PL谱发光强度越强。紫外-可见透过谱发现,涂膜层数越少,透射率越高;而提高退火温度也有助于改善薄膜透射率。结合已得到的微结构信息,对观察到的光学性能进行了合理解释,综合认为旋涂10层并在600℃退火是溶胶凝胶法制备ZnO薄膜的最佳生长条件。ZnO thin films were fabricated on the glass substrates by sol-gel method. SEM revealed that the film compactness and uniformity were improved as the post-deposition annealing temperature increasing. The film surface of the films with more than 10 spin-coated layers was significantly better than that that of the film with spin-coated 5 layers, but the morphology or microstructure had not obviously change when the spin-coating layer number is more than 10. The XRD results revealed all ZnO samples are of wurtzite structure. The XRD peak intensity increases and grain size becomes the bigger with increase of annealing temperature. Photoluminescence （PL） results show that, in the case of higher annealing temperature and less coating layers, the PL intensity is stronger. The transmission of the ZnO films increases with an decrease of spin-coated layer number, while the higher annealing temperature benefits the transmittance of the films. The observed optical properties were explained based on the micro-structure results.

关 键 词：ZNO薄膜 溶胶-凝胶 透射率 光致发光 

分 类 号：O631[理学—高分子化学]