基于F-P腔的压电陶瓷直线驱动研究  

Study on Piezoelectric Ceramic Linear Drive Based on F-P Cavity

作　　者：傅海威[1,2] 平凯[1] 乔学光[1,2] 刘颖刚[1] 

机构地区：[1]西安石油大学光电传感测井教育部重点实验室,陕西西安710065 [2]西北大学物理学系,陕西西安710069

出　　处：《压电与声光》2013年第2期226-228,233,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60727004);国家"八六三"计划基金资助项目(2009AA06Z203);教育部科技创新工程重大项目培育基金资金项目(708087);陕西省自然科学基金资助项目(2011JM8028)

摘　　要：提出一种新的直线驱动压电陶瓷的方法。通过压电陶瓷对可调谐法布里-珀罗(F-P)腔进行驱动,从而改变F-P腔的透射光波长,使用光栅阵列对透射光波长进行定位,找出压电陶瓷的电压-位移特性曲线,并对此曲线取反函数作为新的驱动电压曲线,使压电陶瓷能得到直线驱动。最后使用了F-P腔对这种方法驱动的压电陶瓷运动曲线进行了测试,结果表明,使用这种驱动方法的压电陶瓷运动曲线与曲线起点到终点的直线方差的积分为393.78,而使用三角波电压驱动的压电陶瓷运动曲线与曲线起点到终点的直线方差的积分为44 554.65,可见这种方法使线性程度得到提高。A new piezoelectric ceramic linear driving method has been presented in this paperer. The tunable Fabry-Perot （F-P） cavity is driven by piezoelectric ceramic, thus the wavelength of transmission light through the tunable F-P cavity can be changed. The transmission light wavelength is calibrated by a grating array, so the voltage- displacement characteristc curve of the piezoelectric ceramic can be obtained, fitting the inverse function of this curve as a new drive voltage curve,which can drive the piezoelectric ceramic move as a straight line. The movement curve of piezoelectric ceramic driven by this method has been tested by using the tunable F-P cavity,and the result shows that the use of this method to drive the piezoelectric ceramic, the variance of the movement curve and the straight line which shares the start and end point of the movement curve is 393.78,compared with the result of driving by trian- gular wave voltage which is 44 554.65,the linearity is greatly improved.

关 键 词：压电陶瓷 F-P腔 直线驱动器 

分 类 号：TN763.1[电子电信—电路与系统] TP319[自动化与计算机技术—计算机软件与理论]