纳米氧化锌掺铝薄膜的微观结构研究  

Microstructural study of Al-doped nano-ZnO films deposited on glass substrate by sol-gel method

作　　者：王明光[1] 杨慧[1] 汪嘉恒[1] 宁策[1] 徐奕辰[1] 祁阳[1] 

机构地区：[1]东北大学理学院,辽宁沈阳110004

出　　处：《功能材料》2013年第8期1124-1127,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(51172040)

摘　　要：采用溶胶-凝胶(sol-gel)法在玻璃衬底上制备了纳米ZnO掺铝薄膜,利用X射线衍射仪(XRD)和透射电镜(TEM)对薄膜的微观结构进行了系统的研究。结果表明,所有在玻璃衬底上生长的ZnO薄膜均具有c轴择优取向。掺杂量为2%(原子分数)时,Al在ZnO薄膜中达到最高水平。过量Al掺杂明显减弱薄膜的c轴择优取向。随着Al掺杂量的增加,ZnO晶粒进一步细化。其原因是未进入ZnO晶格的Al以非晶Al2O3的形式在ZnO晶界上形成了对晶界运动的钉扎,从而阻碍了ZnO晶粒进一步长大。The microstructure of Al-doped nano-ZnO thin films deposited on glass substrate by sol-gel method was investigated by X-ray diffraction and transmission electron microscopy. The results show that all the ZnO films prepared on glass substrate have preferred c-axis orientation. XRD reveal that the film with Al content of 2 at % has the highest doping level in ZnO film. Excessive Al-doping can weaken preferred c-axis orientation in the films. The increase of Al content causes the decrease of grain size of ZnO. It is inferred that the surplus Al atoms may form a state of amorphous Al2O3 and pin the movement of ZnO grain boundary, which leads to the decrease of grain size.

关 键 词：ZNO薄膜 微观结构 溶胶-凝胶 AL掺杂 自组装机制 

分 类 号：O766[理学—晶体学]