强电流直流伸展电弧法制备硬质合金微型工具的SiC过渡层和金刚石涂层  

SiC interlayer/diamond coatings prepared on cemented carbide micro-tools by high current DC extended arc chemical vapor deposition

作　　者：黑鸿君[1] 李义锋[1] 刘艳青[1] 唐伟忠[1] 马世杰[2] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083 [2]北京理工大学先进加工技术研究所,北京100081

出　　处：《功能材料》2013年第8期1172-1176,共5页Journal of Functional Materials

摘　　要：采用强电流直流伸展电弧化学气相沉积(HCDCA CVD)技术在硬质合金微型工具表面沉积了SiC涂层作为过渡层,并在此基础之上制备了金刚石涂层。实验结果表明,采用HCDCA CVD技术在硬质合金表面制备的SiC纳米涂层连续、致密;此过渡层可有效地抑制硬质合金基体中Co的外向扩散,确保在不进行酸蚀去Co预处理的情况下,金刚石涂层对硬质合金基体具有良好的附着力。切削检测的结果表明,实验所制备的SiC过渡层/金刚石涂层的微型铣刀与未涂层微型铣刀相比,切削刃没有切削屑的粘结,且加工后的工件表面上毛刺较少。这些结果表明,SiC过渡层/金刚石涂层硬质合金微型工具将具有优异的加工性能。High current DC extended arc chemical vapor deposition （HCDCA CVD） technique was used to deposit a SiC coating which was designed as an interlayer for diamond coatings on cemented carbide micro-tools. The result shows that a continuous and compaet SiC nanostructured interlayer could be prepared by HCDCA CVD technique, and such a SiC interlayer can restrain effectively the out-diffusion of Co element and ensure good adhesion of diamond coatings to the tools without using the acid etching pretreatment to remove Co from the tools. Cutting experiment results show that there is less chips adherent on the SiC interlayer/diamond coated micro-tools than on the uncoated tools. Moreover, surface of the workpieee machined by the coated microtools has fewer burrs than that machined by the uncoated tools. These results indicate that the SiC interlayer/ diamond coated micro-tools may exhibit excellent machining ability.

关 键 词：强电流直流伸展弧化学气相沉积(HCDCA CVD) SiC过渡层 金刚石涂层 微型工具 

分 类 号：TF125.3[冶金工程—粉末冶金]