对称相位函数掩模化的研究  

MASKING OF SYMMETRICAL PHASE FUNCTION

作　　者：白临波[1] 杜春雷[1] 李展[1] 

机构地区：[1]中国科学院光电技术研究所,微细加工光学技术国家重点实验室,四川成都610209

出　　处：《光子学报》2000年第3期255-259,共5页Acta Photonica Sinica

摘　　要：本文对各种连续对称相位函数及其特性进行了分析 ,讨论了相位函数的 2 π调制、2 N 和 N - 1法量化等问题及数据处理过程 ,提出二元衍射元件 CIF( Caltech IntermediateForm)格式掩模数据的生成方法 ,并建立了实用软件 。In this paper a symmetrical phase function and its characteristic have been studied.The 2π modulation of phase function,the quantization using 2 N and N 1 rule and the data processing were studied.The method of making mask data expressed with CIF format is given.A effective software was developed and which is a useful means for making BOE with direct laser writing.

关 键 词：相位函数 掩模化 激光直写 衍射光学元件 

分 类 号：O436.1[机械工程—光学工程]