超光滑加工技术中光学元件表面材料的均匀去除  

Uniform Removal of the Surface Material of the Optical Components in Ultra-smooth Technology

作　　者：陈华男[1] 王君林[1] 刘健[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《光子学报》2013年第4期417-422,共6页Acta Photonica Sinica

基　　金：国家科技重大专项项目(No.2009ZX02205)资助

摘　　要：超光滑加工通常是在保证光学元件面型精度不劣化前提下提升其中高频精度.均匀去除是保证超光滑加工过程中光学元件面型精度不劣化的重要途径.本文以四轴三联动小磨头超光滑加工机床为基础,结合Preston假设,研究了四轴三联动超光滑加工机床对光学元件的材料去除特性,发现当机床取某些特定的参量时,通过等值的驻留时间规划即可实现光学元件表面材料的均匀去除.最后,对这些特定的参量进行了对比实验.实验结果验证了理论分析的正确性.Accuracy of the intermediate frequency and the high frequency, of the optical components, are enhanced during the ultra-smooth processing, under the premise of non- deterioration of its surface accuracy. The uniform removal is an important way to ensure of non- degradation of the surface accuracy of the optical components during the ultra-smooth processing. On the basis of the four-axis three linkage machine with small grinding heads, used for ultra- smooth processing , combined with the Preston hypothesis, the characteristics of the material removal of the optical components are studied. When the machine takes some specific parameters, uniform removal of the surface material of the optical element can be achieved with equivalent dwell time. Finally, comparison tests are done to test the specific parameters. The test results confirm the results of the theoretical analysis.

关 键 词：小磨头 超光滑加工 均匀去除 等值驻留时间 

分 类 号：O439[机械工程—光学工程]