一种基于电磁型微马达的微摩擦测试装置  

A Testing Instrument for Micro-friction Based on Electromagnetic Micro-motor

作　　者：曹长江[1] 张琛[1] 江莹澜 

机构地区：[1]上海交通大学信息存储研究中心,上海市200030

出　　处：《仪表技术与传感器》2000年第10期36-38,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金!资助项目 ( 5970 50 0 7)

摘　　要：随着MEMS技术的发展 ,人们迫切需要对微观世界的摩擦现象进行研究测试 ,以求发现宏观与微观世界中摩擦现象的联系和区别 ,但由于测试条件的限制 ,现在还很难对微观世界进行直接测试。文中提出了一种全新的微小摩擦测试方法———间接测量法 ,利用了微型马达同时作为驱动元件和测试元件 ,通过分析微马达在施加力前后其运动特性的改变 ,间接地计算出微小摩擦力的大小。文中对测试机理和系统实现做了详细介绍。Along with the development of MEMS technology, scientists want to research on micro- friction urgently,hope to find out the relationship and difference between macro-friction and micro-friction. Because of restriction in test condition, it is difficult to measure the micro-world directly. In order to solve it, a new test method---indirect test---is proposed in this paper. A micro-motor was taken as a driver and testing component, when a force is applied to its axis, the micro-friction could be calculated by analyzing the change of motor's characteristics. The principle and construction of the test instrument are elaboratly introduced in this paper.

关 键 词：间接测量 电磁型微马达 MEMS 微摩擦测试装置 

分 类 号：TH117.1[机械工程—机械设计及理论] TH－39